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1. Identity statement
Reference TypeConference Paper (Conference Proceedings)
Sitemtc-m21d.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP3W34T/45PLUL8
Repositorysid.inpe.br/mtc-m21d/2021/11.11.18.55
Last Update2021:11.11.18.55.53 (UTC) simone
Metadata Repositorysid.inpe.br/mtc-m21d/2021/11.11.18.55.53
Metadata Last Update2022:04.03.23.14.40 (UTC) administrator
Secondary KeyINPE--PRE/
Citation KeySilvaNetoGómeCoraTrav:2021:GrChPo
TitleGrowth and characterization of polycrystalline CVD diamond films obtained by MWPACVD at high power 2,45GHz microwave discharge
Year2021
Access Date2024, May 27
Secondary TypePRE CN
Number of Files1
Size408 KiB
2. Context
Author1 Silva Neto, José Vieira da
2 Gómez, Javier Sierra
3 Corat, Evaldo José
4 Trava-Airoldi, Vladimir Jesus
Resume Identifier1
2
3 8JMKD3MGP5W/3C9JH33
Group1 CMS-ETES-DIPGR-INPE-MCTI-GOV-BR
2 CMS-ETES-DIPGR-INPE-MCTI-GOV-BR
3 COPDT-CGIP-INPE-MCTI-GOV-BR
4 COPDT-CGIP-INPE-MCTI-GOV-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Nacional de Pesquisas Espaciais (INPE)
3 Instituto Nacional de Pesquisas Espaciais (INPE)
4 Instituto Nacional de Pesquisas Espaciais (INPE)
Author e-Mail Address1 jvneto.ifsp@gmail.com
2 javiersierra25@gmail.com
3 evaldo.corat@inpe.br
4 vladimirjta@gmail.com
Conference NameCongresso Brasileiro de Carbono
Date10-12 nov.
Book TitleAnais
Tertiary TypePoster
History (UTC)2021-12-16 18:01:46 :: simone -> administrator :: 2021
2022-04-03 23:14:40 :: administrator -> simone :: 2021
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
Version Typepublisher
AbstractAmong all the allotropic forms of Carbon, diamond is the one that attracts the most curiosity and fascination, whether for its characteristic brilliance when cut in the shape of a jewel, or for its extreme and unique properties rarely matched by other materials in nature. In a rapid rise from a technological point of view, much has been achieved in the study of obtaining this material through CVD. This work presents an analysis focused on obtaining CVD diamond films through the microwave plasma activation method (MWPACVD) in a high applied power regime using a modified substrate holder. The films were characterized using Raman scattering spectroscopy and scanning electron microscopy. The results point to optimized conditions for depositing films with growth rates of up to 8 µm/h with good structural quality and uniform microcrystalline morphology along the deposition surface.
AreaFISMAT
Arrangement 1urlib.net > BDMCI > Fonds > Produção pgr ATUAIS > CMS > Growth and characterization...
Arrangement 2urlib.net > BDMCI > Fonds > Produção a partir de 2021 > CGCE > Growth and characterization...
Arrangement 3urlib.net > BDMCI > Fonds > Produção a partir de 2021 > CGIP > Growth and characterization...
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4. Conditions of access and use
data URLhttp://mtc-m21d.sid.inpe.br/ibi/8JMKD3MGP3W34T/45PLUL8
zipped data URLhttp://mtc-m21d.sid.inpe.br/zip/8JMKD3MGP3W34T/45PLUL8
Languageen
Target Filesilva_growth.pdf
User Groupsimone
Reader Groupadministrator
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Visibilityshown
Update Permissionnot transferred
5. Allied materials
Next Higher Units8JMKD3MGPCW/3F358GL
8JMKD3MGPCW/46KTFK8
8JMKD3MGPCW/46KUES5
Citing Item Listsid.inpe.br/bibdigital/2022/04.03.23.11 3
sid.inpe.br/bibdigital/2013/10.14.21.39 2
sid.inpe.br/mtc-m21/2012/07.13.14.45.37 1
Host Collectionurlib.net/www/2021/06.04.03.40
6. Notes
Empty Fieldsarchivingpolicy archivist callnumber conferencelocation copyholder copyright creatorhistory descriptionlevel dissemination doi e-mailaddress edition editor format isbn issn keywords label lineage mark mirrorrepository nextedition notes numberofvolumes orcid organization pages parameterlist parentrepositories previousedition previouslowerunit progress project publisher publisheraddress readpermission rightsholder schedulinginformation secondarydate secondarymark serieseditor session shorttitle sponsor subject tertiarymark type url volume
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